A Flexible Humidity Sensor Based on Co3O4 Nanoneedles with High Sensitivity and Quick Response

被引：2

作者：

Qi, Qi ^{[1
]}

Wang, Qi ^{[1
]}

Liu, Nanliu ^{[1
]}

Zheng, Xiaoping ^{[1
]}

Ding, Xiongjie ^{[1
]}

Liang, Zhiwen ^{[1
]}

Wang, Qing ^{[1
]}

Zhang, Guoyi ^{[1
]}

机构：

[1] Peking Univ, Dongguan Inst Optoelect, Dongguan 523808, Peoples R China

来源：

JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS | 2020年 / 15卷 / 07期

基金：

国家重点研发计划;

关键词：

Co3O4; Nanostructures; Humidity Sensors; Flexible Sensors; Chemical Sensors;

D O I：

10.1166/jno.2020.2788

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A flexible humidity sensor has been realized based on Co3O4 nanoneedles via a deposition technique. High humidity sensing and excellent flexible properties are observed in the tests. The impedance of the as-prepared sensor decreases by nearly three orders of magnitude with increasing relative humidity (RH) from 11% to 95% on a semilogarithmic scale. The response and recovery times are about 3 and 6 s respectively. The maximum hysteresis is less than 4% under 80% RH. No obvious changes for the sensing performance can be obtained after 100 bending/extending cycles and bending tests. These performances make the current sensor a good candidate for flexible humidity detection.

引用

页码：870 / 874

页数：5

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