Atomic layer deposition of alumina on γ-Al2O3 nanofibres

被引：5

作者：

Jogiaas, Taivo ^{[1
]}

Arroval, Tonis ^{[1
]}

Kollo, Lauri ^{[2
]}

Kozlova, Jekaterina ^{[1
]}

Kaeaembre, Tanel ^{[1
]}

Maendar, Hugo ^{[1
]}

Tamm, Aile ^{[1
]}

Hussainova, Irina ^{[2
]}

Kukli, Kaupo ^{[1
,3
]}

机构：

[1] Univ Tartu, Inst Phys, Dept Mat Sci, EE-51014 Tartu, Estonia

[2] Tallinn Univ Technol, Dept Mat Engn, EE-19086 Tallinn, Estonia

[3] Univ Helsinki, Dept Chem, Helsinki 00014, Finland

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2014年 / 211卷 / 02期

关键词：

Al2O3; atomic layer deposition; indentation; nanocomposites; nanofibres; TEMPERATURE;

D O I：

10.1002/pssa.201330083

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Atomic layer deposition (ALD) has been exploited for coating -alumina nanofibres with amorphous alumina, using trimethylaluminium Al(CH3)(3) (TMA) and water as precursors. The experiments were carried out at 150 or 300 degrees C, using 100 cycles (or an integer multiple of it) of ALD treatment. Heat-treatment was applied to the fibres to evaluate possible changes in ALD process development. Some samples were compacted and hardness was measured to preliminarily evaluate the effect of ALD and possible usage of fibres as raw material for hard ceramics. X-ray absorption spectroscopy, X-ray diffraction, scanning electron microscopy (SEM) and Vickers hardness test were used to characterize the fibres (with and without ALD coating). Alumina nanofibres can be considered as reinforcements in structural composites or as a material for inorganic membranes, suitable to applications at elevated temperatures.

引用

页码：403 / 408

页数：6

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