共 50 条
- [42] Surface amorphization, sputter rate, and intrinsic stresses of silicon during low energy Ga+ focused-ion beam milling NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2009, 267 (18): : 3072 - 3075
- [45] SUB-100 NM PATTERN-FORMATION USING A NOVEL LITHOGRAPHY WITH SINX RESIST BY FOCUSED ION-BEAM EXPOSURE AND DRY-ETCHING DEVELOPMENT JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (02): : 268 - 274
- [50] Measurement of Sub-Surface Core Damage in Sandwich Structures Using In-situ Hertzian Indentation During X-ray Computed Tomography Experimental Mechanics, 2014, 54 : 1385 - 1393