Two-photon photopolymerization of functional micro-devices

被引：9
|
作者：
Kawata, S [1 ]
Sun, HB [1 ]
机构：
[1] Osaka Univ, Dept Appl Phys, Suita, Osaka 5650871, Japan
来源：
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY | 2002年 / 15卷 / 03期
关键词：
two-photon photopolymerization; three-dimensional micro-nano fabrication; optical MEMS; femtosecond laser;
D O I：
10.2494/photopolymer.15.471
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
The current trend in two-photon laser micro-nano fabrication is device functionalization. In this paper, we report two kinds of functional devices, i.e., optically active microstructures produced by dye-doping photopolymerization and mechanically workable micro-oscillators driven by the laser trapping force. These works would open the door to two-photon production of various practical three-dimensional polymer optoelectronic/photonic devices and microelectromechanical system (MEMS).
引用
收藏
页码：471 / 474
页数：4
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