Two-photon photopolymerization of functional micro-devices

被引：9

作者：

Kawata, S ^{[1
]}

Sun, HB ^{[1
]}

机构：

[1] Osaka Univ, Dept Appl Phys, Suita, Osaka 5650871, Japan

来源：

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY | 2002年 / 15卷 / 03期

关键词：

two-photon photopolymerization; three-dimensional micro-nano fabrication; optical MEMS; femtosecond laser;

D O I：

10.2494/photopolymer.15.471

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

The current trend in two-photon laser micro-nano fabrication is device functionalization. In this paper, we report two kinds of functional devices, i.e., optically active microstructures produced by dye-doping photopolymerization and mechanically workable micro-oscillators driven by the laser trapping force. These works would open the door to two-photon production of various practical three-dimensional polymer optoelectronic/photonic devices and microelectromechanical system (MEMS).

引用

页码：471 / 474

页数：4

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