A two-dimensional high-frequency electrostatic microscanner

被引：1
|
作者：
Liu, Yaobo [1 ,2 ]
Yuan, Weizheng [1 ,2 ]
Qiao, Dayong [1 ,2 ]
Wu, Meng [1 ,2 ]
Yang, Xuan [1 ,2 ]
Lian, Bin [3 ]
机构：
[1] Minist Educ, Key Lab Micro Nano Syst Aerosp, Xian 710072, Peoples R China
[2] Shaanxi Prov Key Lab Micro & Nano Electromech Sys, Xian 710072, Peoples R China
[3] Northwestern Polytech Univ, Shenzhen Inst, Shenzhen 518057, Peoples R China
来源：
CHINESE OPTICS LETTERS | 2013年 / 11卷 / 11期
基金：
中国国家自然科学基金;
关键词：
MEMS-SCANNER; MIRROR;
D O I：
10.3788/COL201311.112302
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The design of a two-dimensional high-frequency electrostatic microscanner is presented, and an improved method for routing isolation trenches is investigated to increase the reliability and mechanical stability of the resulting device. A sample device is fabricated and tested using an optimized micromachining process. Measurement results indicate that the sample device oscillates at inherent frequencies of 11586 and 2047 Hz around the two rotational axes, thereby generating maximum twisting angles of +/- 7.28 degrees and +/- 5.63 degrees, respectively, under two square waves of 40 V. These characteristics confirm the validity of our design and satisfy the requirements of a laser projector with VGA standards.
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收藏
页数：4
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