Design and modes of a novel two-dimensional microscanner with electrostatic actuation

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作者：
机构：
[1] Liu, Yaobo
[2] Yuan, Weizheng
[3] Qiao, Dayong
[4] Yang, Xuan
[5] Liang, Xiaowei
[6] Lian, Bin
来源：
Yuan, W. (yuanwz@nwpu.edu.cn) | 2013年 / Chinese Optical Society卷 / 33期
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D O I：
10.3788/AOS201333.0623001
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摘要：
10
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