A two-dimensional high-frequency electrostatic microscanner

被引：0
|
作者：
刘燿波 [1 ,2 ]
苑伟政 [1 ,2 ]
乔大勇 [1 ,2 ]
吴蒙 [1 ,2 ]
杨璇 [1 ,2 ]
练彬 [3 ]
机构：
[1] Key Laboratory of Micro/Nano Systems for Aerospace,Ministry of Education
[2] Northwestern Polytechnical University Shenzhen Institute
来源：
Chinese Optics Letters | 2013年 / 11卷 / 11期
关键词：
A two-dimensional high-frequency electrostatic microscanner; high;
D O I：
暂无
中图分类号：
TN946.1 [屏幕录像系统];
学科分类号：
0810 ; 081001 ;
摘要：
The design of a two-dimensional high-frequency electrostatic microscanner is presented, and an improved method for routing isolation trenches is investigated to increase the reliability and mechanical stability of the resulting device. A sample device is fabricated and tested using an optimized micromachining process. Measurement results indicate that the sample device oscillates at inherent frequencies of 11586 and 2047 Hz around the two rotational axes, thereby generating maximum twisting angles of ±7.28 and ±5.63, respectively, under two square waves of 40 V. These characteristics confirm the validity of our design and satisfy the requirements of a laser projector with VGA standards.
引用
收藏
页码：83 / 86
页数：4
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