Modeling of a bimetallic MEMS-based infrared detector

被引：0
|
作者：
Pevtsov, E. Ph [1 ]
Breev, S. V. [1 ]
Demenkova, T. A. [1 ]
机构：
[1] Moscow Technol Univ MIREA, Moscow, Russia
来源：
6TH INTERNATIONAL CONFERENCE: MODERN TECHNOLOGIES FOR NON-DESTRUCTIVE TESTING | 2018年 / 289卷
关键词：
D O I：
10.1088/1757-899X/289/1/012022
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In work techniques of calculations of the key parameters of the bimetal capacitive IR detectors matrix are presented. Sensitivity characteristics of the bimetal detector were calculated and prototype model of detector in the form of bimetallic console was produced. The possibility of use of capacitive MEMS-receivers on basis of bimetallic effect as an alternative to pyroelectric and microbolometer IR detectors is shown.
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页数：5
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