Modeling multilayered MEMS-based micro-fluidic systems

被引：0
|
作者：
Shekhar Bhansali
Helen Benjamin
Vandana Upadhyay
H. Thurman Henderson
Chong H. Ahn
Nihat Okulan
Kwang Wook Oh
机构：
[1] the University of South Florida,the Nanomaterials and Nanomanufacturing Research Center, Department of Electrical Engineering
[2] the Center for Microelectronic Sensors and MEMS,Department of Electrical & Computer Engineering and Computer Science
[3] the University of Cincinnati,undefined
来源：
JOM | 2004年 / 56卷
关键词：
Electrical Impedance Tomography; High Pressure Drop; Electrochemical Immunoassay; Inlet Length; Voltage Potential Difference;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This article describes the design, fabrication, and simulation of two micro-electromechanical systems-based micro-fluidic systems. The first system, a lab-on-a-chip, enables electrochemical immunoassay-based chemical/biological detection. The second is a micro-fluidic bio-impedance sensor. The relevance of fluidic dynamics in micro-fluidic channels is discussed in context of fluid paths and misalignments in the channels that appear during multi-level structure integration. Also discussed is the effect of channel dimensions on the flow profile and on performance within the micro-systems.
引用
收藏
页码：57 / 61
页数：4
相关论文
共 50 条
  • [1] Modeling multilayered MEMS-based micro-fluldic systems
    Bhansali, S
    Benjamin, H
    Upadhyay, V
    Okulan, N
    Oh, KW
    Henderson, HT
    Ahn, CH
    [J]. JOM, 2004, 56 (03) : 57 - 61
  • [2] MEMS based micro-fluidic system for chromatographic analysis of liquid samples
    Golubovic, NC
    Kang, QH
    Henderson, HT
    Pinto, N
    [J]. MICROFLUIDIC DEVICES AND SYSTEMS, 1998, 3515 : 86 - 93
  • [3] MEMS solutions for precision micro-fluidic dispensing application
    Menzel, C
    Hoisington, P
    [J]. IS&T'S NIP20: INTERNATIONAL CONFERENCE ON DIGITAL PRINTING TECHNOLOGIES, PROCEEDINGS, 2004, : 169 - 175
  • [4] Fault Modeling and Fault Simulation in Mixed Micro-Fluidic Microelectronic Systems
    Hans G. Kerkhoff
    Hans P.A. Hendriks
    [J]. Journal of Electronic Testing, 2001, 17 : 427 - 437
  • [5] Fault modeling and fault simulation in mixed micro-fluidic microelectronic systems
    Kerkhoff, HG
    Hendriks, HPA
    [J]. JOURNAL OF ELECTRONIC TESTING-THEORY AND APPLICATIONS, 2001, 17 (05): : 427 - 437
  • [6] A novel molecular approach to modeling phase change in micro-fluidic systems
    Bien, DE
    Chiriac, VA
    [J]. ITHERM 2004, VOL 2, 2004, : 598 - 604
  • [7] Micro-jet pump for micro-fluidic systems
    Li, Xiuhan
    Yu, Xiaomei
    Cui, Hailiang
    Li, Zhanhua
    Zhang, Dacheng
    [J]. 2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2006, : 809 - +
  • [8] Fabrication of a micro-fluidic filter/channel using MEMS technology
    Eun, Duk-Soo
    Kong, Dae-Young
    Yu, In-Sik
    Yoo, Hyun-Jun
    Hong, Young-Myong
    Jang, Jong-Min
    Choi, Pyung
    Kong, Seong Ho
    Shin, Jang-Kyoo
    Lee, Jong-Hyun
    [J]. MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 2007, : 346 - +
  • [9] Laser-based fabrication of micro-fluidic components and systems
    Kim, JH
    Xu, XF
    [J]. MICROFLUIDICS, BIOMEMS, AND MEDICAL MICROSYSTEMS, 2003, 4982 : 73 - 82
  • [10] Optimization of Cavity Fabrication for Micro-Fluidic Systems
    Wang, X. S.
    Balluch, B.
    Smetana, W.
    Stangl, G.
    [J]. 2008 31ST INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY: RELIABILITY AND LIFE-TIME PREDICTION, 2008, : 414 - 419
12345