MEMS solutions for precision micro-fluidic dispensing application

Customer demands for increased performance within the precision micro-fluidic markets, including high image quality printing, can be satisfied by designing piezoelectrically actuated inkjet printhead modules with single crystal silicon Micro-Electro-Mechanical (MEMS) manufacturing process-es. The result is a highly flexible design and manufacturing space. This combination allows the efficient development of a high quality product family capable of servicing a broad range of printing applications in addition to pushing "inkjet technology" into the more generalized precision liquid dispensing application space. The following text describes current performance drivers in the precision micro-fluidic market and a MEMS based, bending mode, piezoelectrically actuated inkjet module, (the Spectra, Inc. M-Class) designed to meet these evolving needs. In addition, the inherent performance and manufacturing flexibility of the associated product family is highlighted.