A three-dimensional optical photonic crystal

被引:68
|
作者
Lin, SY [1 ]
Fleming, JG [1 ]
机构
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
关键词
photonic bandgap (PBG); photonic crystal; silicon photonics;
D O I
10.1109/50.802977
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the successful fabrication of a working three-dimensional (3-D) crystal operating at optical wavelength lambda. The minimum feature size of the 3-D structure is 180 nm. The 3-D crystal is free from defects over the entire 6-inch silicon wafer and has an absolute photonic bandgap (PBG) centered at lambda similar to 1.6 mu m. Our data pro,ides the first conclusive evidence for the existence of a complete 3-D PEG in optical lambda. This development will pave the way to tinier, cheaper, more effective waveguides, optical switches and lasers.
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页码:1944 / 1947
页数:4
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