Chemically amplified resists based on poly(1,4-dioxaspiro[4.4]nonane-2-methyl methacrylate)

被引：9
|
作者：
Kim, JB
Park, JJ
Jang, JH
机构：
[1] Korea Inst Sci & Technol, Dept Adv Mat Engn, Seoul 130650, South Korea
[2] Korea Adv Inst Sci & Technol, Dept Chem, Yusong Gu, Taejon 305701, South Korea
来源：
POLYMER | 2000年 / 41卷 / 01期
关键词：
chemically amplified resist; poly(1,4-dioxaspiro[4.4]nonane-2-methyl methacrylate); ketal-protected polymer;
D O I：
10.1016/S0032-3861(99)00154-8
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
The present paper describes a novel class of ketal-protected chemically amplified photoresists. Poly(1,4-dioxaspiro[4.4]nonane-2-methyl methacrylate) (poly(DNMMA)) was synthesized and evaluated as a matrix polymer. The ketal group of the polymer hydrolyzes under acid cataIysis to give two alcohol functionalities and a cyclopentanone. The ketal polymer is insoluble in an aqueous developer, while the hydrolyzed products are soluble. The decomposition temperature in the presence of acid was below room temperature. The polymer has high transparency in the deep UV region and its absorbances were 0.015 mu m(-1) at 248 nm and 0.163 mu m(-1) at 193 nm. The existence of the generated cyclopentanone after deprotection improves sensitivity by increasing acid diffusion. (C) 1999 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：149 / 153
页数：5
相关论文
共 25 条
  • [1] (2R,3R)-1,4-Dioxaspiro[4.4]nonane-2,3-dicarboxylic and (2R, 3R)-1,4-dioxaspiro[4.5]decane-2,3-dicarboxylic acids
    Minyaev, Mikhail E.
    Roitershtein, Dmitrii M.
    Vinogradov, Alexey A.
    Ananyev, Ivan V.
    Nifant'ev, Ilya E.
    ACTA CRYSTALLOGRAPHICA SECTION E-CRYSTALLOGRAPHIC COMMUNICATIONS, 2018, 74 : 1058 - +
  • [2] Inclusion complex of (S)-1,3-butanediol with (S,S)-(+)-trans-2,3-bis(hydroxydiphenylmethyl)-1,4-dioxaspiro[4.4]nonane
    Nishikawa, K
    Matsumoto, A
    Tsukada, H
    Shiro, M
    Toda, F
    ACTA CRYSTALLOGRAPHICA SECTION C-CRYSTAL STRUCTURE COMMUNICATIONS, 1997, 53 : 351 - 353
  • [3] Inclusion complex of (S)-1,3-butanediol with (S,S)-(+)-trans-2,3- bis(hydroxydiphenylmethyl)-1,4-dioxaspiro[4.4]nonane
    Nishikawa, Kazuyoshi
    Matsumoto, Akiko
    Tsukada, Harumichi
    Shiro, Motoo
    Toda, Fumio
    Acta Crystallographica, Section C: Crystal Structure Communications, 1997, 53 (pt 3): : 351 - 353
  • [4] 1:1 and 2:1 inclusion complexes of (R,R)-(-)-trans-2,3-bis(hydroxydiphenyl-methyl)-1,4-dioxaspiro[4.4]nonane with N-allylfuran-2-carboxanilide which upon irradiation in the solid state give (-)- and (+)-photocyclization products, respectively
    Department of Applied Chemistry, Faculty of Engineering, Ehime University, Matsuyama, Ehime 790, Japan
    J. Org. Chem., 19 (6490-6491):
  • [5] 1:1 and 2:1 inclusion complexes of (R,R)-(-)-trans-2,3-bis(hydroxydiphenylmethyl)-1,4-dioxaspiro[4.4]nonane with N-allylfuran-2-carboxanilide which upon irradiation in the solid state give (-)- and (+)-photocyclization products, respectively
    Toda, F
    Miyamoto, H
    Kanemoto, K
    JOURNAL OF ORGANIC CHEMISTRY, 1996, 61 (19): : 6490 - 6491
  • [6] CORRECTION OF STRUCTURE DETERMINATIONS ON MONOMETHYL-SUBSTITUTED 2-(CHLOROMETHYL)-1,4-DIOXASPIRO[4.5]DECANES, 2-METHYLENE-1,4-DIOXASPIRO[4.5]DECANES, 1-(1'-CYCLOHEXENE-1'-YLOXY)-2-PROPANES AND RAC-4,5,6,7-TETRAHYDRO-3-METHYL-1-BENZOFURANS
    RUNSINK, J
    MEIER, L
    ZEITSCHRIFT FUR NATURFORSCHUNG SECTION B-A JOURNAL OF CHEMICAL SCIENCES, 1985, 40 (03): : 393 - 397
  • [7] 2-[(E)-({3-[(E)-(2-Hydroxybenzylidene)-aminomethyl]-1,4-dioxaspiro[4.5]decan-2-yl}methyl)iminomethyl]phenol
    Jiang, Yan
    Wang, Lili
    Bian, Jing
    Du, Xiaoying
    Sun, Xiaoqiang
    ACTA CRYSTALLOGRAPHICA SECTION E-CRYSTALLOGRAPHIC COMMUNICATIONS, 2012, 68 : O2296 - +
  • [8] (R,R)-(-)-trans-1,4-Dioxaspiro[4,4]nonane-2,3-diylbis(diphenylmethanol)-N-allyl-N-propyl-3-oxocyclohexene-1-carboxamide (2/1)
    Ohba, S
    Miyamoto, H
    ACTA CRYSTALLOGRAPHICA SECTION E-STRUCTURE REPORTS ONLINE, 2004, 60 : O216 - O218
  • [9] 6-Benzyl-3-(1,4-dioxaspiro[4.5]decan-2-yl)-8,8-dimethyl-1-oxa-2,6-diazaspiro[4.4]non-2-ene-7,9-dione
    Bathich, Yaser
    Shaameri, Zurina
    Hamzah, Ahmad Sazali
    Quah, Ching Kheng
    Fun, Hoong-Kun
    ACTA CRYSTALLOGRAPHICA SECTION E-STRUCTURE REPORTS ONLINE, 2009, 65 : O2941 - U2545
  • [10] 1:1 and 2:1 Inclusion Complexes of (R,R)-(-)-trans-2,3-Bis(hydroxydiphenyl- methyl)-1,4-dioxaspiro[4,4]nonane with N-Allylfuran-2-carboxanilide Which upon Irradiation in the Solid State Give (-)- and (+)-Photocyclization Products, Respectively
    J Org Chem, 19 (6490):
123