Scanning Probe Metrology: From the Metrological SFM to the Micro/Nano CMM

被引：6

作者：

Dai, Gaoliang ^{[1
]}

Buetefisch, Sebastian

Pohlenz, Frank

Danzebrink, Hans-Ulrich

Koenders, Ludger

机构：

[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany

来源：

TM-TECHNISCHES MESSEN | 2009年 / 76卷 / 02期

关键词：

Nano and micro metrology; scanning probe microscopy; coordinate measuring machine; 3D probe;

D O I：

10.1524/teme.2009.0921

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A coordinate measuring machine (CMM) based on a nano positioning and measuring machine (NMM) has been built up for satisfying various demands on micro and nanoscale dimensional metrology. During the past years two kinds of tactile micro/nano CMM probes have been developed and coupled to the system. In this paper, the development of the micro/nano CMM will be reported. Detailed information on the design ideas concerning the key components of the CMM (positioning stage, probe, software), methods of probe characterization, and measurement results for a typical test artefact are given.

引用

页码：43 / 53

页数：11

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