Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array

被引：32
|
作者：
Wang, Hongliang [1 ,2 ]
Wang, Xiangjun [1 ]
He, Changde [2 ]
Xue, Chenyang [2 ]
机构：
[1] Tianjin Univ, MOEMS Educ Minist Key Lab, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China
[2] North Univ China, Key Lab Instrumentat Sci & Dynam Measurement, Natl Key Lab Elect Measurement Technol, Minist Educ, Taiyuan 030051, Peoples R China
来源：
MICROMACHINES | 2014年 / 5卷 / 03期
关键词：
capacitive ultrasonic transducer; linear array; beam directivity; sidelobe suppression; CMUT ARRAYS; INTERCONNECTS; FABRICATION;
D O I：
10.3390/mi5030420
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
An ultrasonic transducer is a key component to achieve ultrasonic imaging. This paper designs a new type of Microelectromechanical Systems (MEMS) based capacitive ultrasonic transducer and a linear array based on the transducer. Through directivity analysis, it can be found that its directivity is weak due to the small size of the designed transducer, but the directivity of the designed linear array is very strong. In order to further suppress the sidelobe interference and improve the resolution of the imaging system and imaging quality, the Dolph-Chebyshev weighting method and the Taylor weighting method are used to process -40dB sidelobe suppression, and satisfactory results are obtained, which can meet actual requirements.
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页码：420 / 431
页数：12
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