Design of air-coupled capacitive micromachined ultrasonic transducer

被引：0
|
作者：
Zhang, Hui [1 ]
Li, Zhi [1 ]
Zheng, Guanru [1 ]
Zeng, Zhoumo [1 ]
机构：
[1] State Key Laboratory of Precision Measurement Technology and Instrument, Tianjin University, Tianjin,300072, China
来源：
Shengxue Xuebao/Acta Acustica | 2019年 / 44卷 / 01期
关键词：
D O I：
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学科分类号：
摘要：
8
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页码：116 / 124
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