Large-scale production of nano-twinned, ultrafine-grained copper

被引:80
|
作者
Hodge, A. M.
Wang, Y. M.
Barbee, T. W., Jr.
机构
[1] Lawrence Livermore Natl Lab, Mat Sci & Technol Div, Livermore, CA 94550 USA
[2] Lawrence Livermore Natl Lab, Nanoscale Synth & Characterizat Lab, Livermore, CA 94550 USA
关键词
ultrafine-grained copper; nano-twinned; multilayers; sputtering;
D O I
10.1016/j.msea.2006.05.109
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Large-scale production of high purity (99.999%), nano-twinned, and ultrafine-grained copper foils (22 mu m thick) was successfully implemented by the use of nanoscale multilayer technology. The process allows the production of up to fourteen 10 cm diameter foils during a single deposition run with high levels of reproducibility. Mechanical tests demonstrate that the strength of the Cu foils (alpha(y) similar to 540-690 MPa) compares favorably to ultratine-grained copper samples produced by other methods. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:272 / 276
页数:5
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