Structure and mechanical properties of pure titanium film deposited onto TiNi shape memory alloy substrate by magnetron DC sputtering

被引：20
|
作者：
Sonoda, T [1 ]
Watazu, A [1 ]
Zhu, J [1 ]
Shi, W [1 ]
Kato, K [1 ]
Asahina, T [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Moriyama Ku, Nagoya, Aichi 4638560, Japan
来源：
THIN SOLID FILMS | 2004年 / 459卷 / 1-2期
关键词：
shape memory alloy; TiNi; titanium; coating; sputtering; biocompatibility;
D O I：
10.1016/j.tsf.2003.12.147
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In order to improve the biocompatibility of TiNi shape memory alloy, coating of the alloy substrates with pure titanium films by magnetron DC sputtering in Ar gas was examined and the effects of the substrate temperature (ranging from 20 to approx. 400 degreesC) on the formation of the titanium film were investigated. The titanium films deposited under various substrate temperatures appeared to be uniform and adhesive. Under SEM, the surface morphology of the obtained titanium films gradually changed from the structure consisting of fine particles to that of fine fibers with increase in substrate temperature. Based on XRD, it was concluded that each of the films consisted of alpha-titanium phase. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：212 / 215
页数：4
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