Miniature holistic displacement sensor by immersion diffractive interferometry

被引:2
|
作者
Jourlin, Yves [1 ]
Parriaux, Olivier [1 ]
Fuchs, Joerg [2 ]
机构
[1] Univ St Etienne, Lab Hubert Curien, UMR CNRS 5516, F-42000 St Etienne, France
[2] Univ Jena, IAP, Jena, Germany
来源
OPTICS EXPRESS | 2009年 / 17卷 / 11期
关键词
GRATINGS;
D O I
10.1364/OE.17.009080
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
High interference contrast is obtained in a miniature dual-grating transmission displacement sensor submitted to an essentially uniform light flood of arbitrary polarization with multifunctional liquid film between gratings. (C) 2009 Optical Society of America
引用
收藏
页码:9080 / 9088
页数:9
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