Miniature holistic displacement sensor by immersion diffractive interferometry

被引：2
|
作者：
Jourlin, Yves [1 ]
Parriaux, Olivier [1 ]
Fuchs, Joerg [2 ]
机构：
[1] Univ St Etienne, Lab Hubert Curien, UMR CNRS 5516, F-42000 St Etienne, France
[2] Univ Jena, IAP, Jena, Germany
来源：
OPTICS EXPRESS | 2009年 / 17卷 / 11期
关键词：
GRATINGS;
D O I：
10.1364/OE.17.009080
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
High interference contrast is obtained in a miniature dual-grating transmission displacement sensor submitted to an essentially uniform light flood of arbitrary polarization with multifunctional liquid film between gratings. (C) 2009 Optical Society of America
引用
收藏
页码：9080 / 9088
页数：9
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