Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode

被引：2
|
作者：
Schaude, Janik [1 ]
Albrecht, Julius [1 ]
Kloepzig, Ute [1 ]
Groeschl, Andreas C. [1 ]
Hausotte, Tino [1 ]
机构：
[1] Friedrich Alexander Univ Erlangen Nuremberg FAU, Inst Mfg Metrol, Nagelsbachstr 25, D-91054 Erlangen, Germany
来源：
TM-TECHNISCHES MESSEN | 2019年 / 86卷
关键词：
Atomic force microscopy; tilting AFM; piezoresistive cantilever; nano measuring machine;
D O I：
10.1515/teme-2019-0035
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This article presents a new tilting atomic force microscope (AFM) with an adjustable probe direction and piezoresistive cantilever operated in tapping-mode. The AFM is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The whole setup is integrated into a nano measuring machine (NMM-1) and the metrological traceability of the piezoresistive cantilever is warranted by in situ calibration on the NMM-1. To demonstrate the capabilities of the tilting AFM, measurements were conducted on a step height standard.
引用
收藏
页码：S12 / S16
页数：5
相关论文
共 50 条
  • [1] A virtual tapping-mode atomic force microscope
    Zhou, Xianwei
    Fang, Yongchun
    [J]. 2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2006, : 501 - 504
  • [2] Preventing Chaotic Motion in Tapping-Mode Atomic Force Microscope
    Rodrigues K.S.
    Balthazar J.M.
    Tusset A.M.
    de Pontes B.R.
    Jr.
    Bueno Á.M.
    [J]. Journal of Control, Automation and Electrical Systems, 2014, 25 (6) : 732 - 740
  • [3] Harmonic and power balance tools for tapping-mode atomic force microscope
    Sebastian, A
    Salapaka, MV
    Chen, DJ
    Cleveland, JP
    [J]. JOURNAL OF APPLIED PHYSICS, 2001, 89 (11) : 6473 - 6480
  • [4] Cantilevers with integrated sensor for time-resolved force measurement in tapping-mode atomic force microscopy
    Sarioglu, A. F.
    Solgaard, O.
    [J]. APPLIED PHYSICS LETTERS, 2008, 93 (02)
  • [5] Imaging bandwidth of the tapping mode atomic force microscope probe
    Kokavecz, J
    Marti, O
    Heszler, P
    Mechler, A
    [J]. PHYSICAL REVIEW B, 2006, 73 (15)
  • [6] Redesigned Sensor Holder for an Atomic Force Microscope with an Adjustable Probe Direction
    Janik Schaude
    Maxim Fimushkin
    Tino Hausotte
    [J]. International Journal of Precision Engineering and Manufacturing, 2021, 22 : 1563 - 1571
  • [7] Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation
    Schaude J.
    Hausotte T.
    [J]. Nanomanufacturing and Metrology, 2022, 5 (02) : 139 - 148
  • [8] Redesigned Sensor Holder for an Atomic Force Microscope with an Adjustable Probe Direction
    Schaude, Janik
    Fimushkin, Maxim
    Hausotte, Tino
    [J]. INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2021, 22 (09) : 1563 - 1571
  • [9] The role of adhesion in tapping-mode atomic force microscopy
    Sarid, D
    Hunt, JP
    Workman, RK
    Yao, X
    Peterson, CA
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 66 (Suppl 1): : S283 - S286
  • [10] Energy dissipation in tapping-mode atomic force microscopy
    Cleveland, JP
    Anczykowski, B
    Schmid, AE
    Elings, VB
    [J]. APPLIED PHYSICS LETTERS, 1998, 72 (20) : 2613 - 2615
12345