Harmonic and power balance tools for tapping-mode atomic force microscope

被引:79
|
作者
Sebastian, A [1 ]
Salapaka, MV
Chen, DJ
Cleveland, JP
机构
[1] Iowa State Univ, Dept Elect & Comp Engn, Ames, IA 50011 USA
[2] Asylum Res, Santa Barbara, CA 93117 USA
关键词
D O I
10.1063/1.1365440
中图分类号
O59 [应用物理学];
学科分类号
摘要
The atomic force microscope (AFM) is a powerful tool for investigating surfaces at atomic scales. Harmonic balance and power balance techniques are introduced to analyze the tapping-mode dynamics of the atomic force microscope. The harmonic balance perspective explains observations hitherto unexplained in the AFM literature. A nonconservative model for the cantilever-sample interaction is developed. The energy dissipation in the sample is studied and the resulting power balance equations combined with the harmonic balance equations are used to estimate the model parameters. Experimental results confirm that the harmonic and power balance tools can be used effectively to predict the behavior of the tapping cantilever. (C) 2001 American Institute of Physics.
引用
收藏
页码:6473 / 6480
页数:8
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