Possibility of realizing a gas sensor using surface conductive layer on diamond films

被引：36

作者：

Gi, RS ^{[1
]}

Ishikawa, T ^{[1
]}

Tanaka, S ^{[1
]}

Kimura, T ^{[1
]}

Akiba, Y ^{[1
]}

Iida, M ^{[1
]}

机构：

[1] NITTAN CO LTD, TECH DIV, SHIBUYA KU, TOKYO 151, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1997年 / 36卷 / 4A期

关键词：

diamond films; hot-filament CVD method; p-type surface conductive layer; hydrogen-terminated surface; oxidization gas; NO; gas sensor;

D O I：

10.1143/JJAP.36.2057

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The electrical surface resistance of diamond films deposited by the hot-filament chemical vapor deposition (CVD) method is measured in oxidizing and reducing atmospheres. The electrical surface resistance decreases in NO2, HCl and O-3 gases. On the other hand, it increases in NH3 gas. The mechanism of change in electrical resistance is explained by the formation mechanism of a p-type surface conductive layer. The realization of a gas sensor will be discussed considering the experimentally obtained results.

引用

页码：2057 / 2060

页数：4

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