Possibility of realizing a gas sensor using surface conductive layer on diamond films

被引：36
|
作者：
Gi, RS [1 ]
Ishikawa, T [1 ]
Tanaka, S [1 ]
Kimura, T [1 ]
Akiba, Y [1 ]
Iida, M [1 ]
机构：
[1] NITTAN CO LTD, TECH DIV, SHIBUYA KU, TOKYO 151, JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1997年 / 36卷 / 4A期
关键词：
diamond films; hot-filament CVD method; p-type surface conductive layer; hydrogen-terminated surface; oxidization gas; NO; gas sensor;
D O I：
10.1143/JJAP.36.2057
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The electrical surface resistance of diamond films deposited by the hot-filament chemical vapor deposition (CVD) method is measured in oxidizing and reducing atmospheres. The electrical surface resistance decreases in NO2, HCl and O-3 gases. On the other hand, it increases in NH3 gas. The mechanism of change in electrical resistance is explained by the formation mechanism of a p-type surface conductive layer. The realization of a gas sensor will be discussed considering the experimentally obtained results.
引用
收藏
页码：2057 / 2060
页数：4
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