Methods for analyzing quality of diffraction gratings for linear-displacement sensors

被引：8
|
作者：
Shishova, M. V. [1 ]
Odinokov, S. B. [1 ]
Lushnikov, D. S. [1 ]
Zherdev, A. Y. [1 ]
机构：
[1] NE Bauman Moscow State Tech Univ, Moscow, Russia
来源：
JOURNAL OF OPTICAL TECHNOLOGY | 2018年 / 85卷 / 07期
关键词：
D O I：
10.1364/JOT.85.000396
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The fundamental methods for analyzing the parameters of diffraction gratings (DGs) are presented. The features of the application of DGs as measurement scales in a linear-displacement sensor system are analyzed. A method and quality criteria for monitoring the parameters of real samples of measurement scales are proposed. These criteria generalize all diffraction efficiencies that affect the formation of quadrature signals in the system of an interferometric linear-displacement sensor. (C) 2018 Optical Society of America
引用
收藏
页码：396 / 400
页数：5
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