HIGH-PRECISION MEASUREMENTS OF THE GROOVE SPACING OF DIFFRACTION GRATINGS USING THE INTERFERENCE DIFFRACTOMETER AND STUDY OF THE QUALITY OF DIFFRACTION GRATINGS

被引：0
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作者：
VITUSHKIN, LF
ZEILIKOVICH, IS
KOROTKOV, VI
PULKIN, SA
机构：
来源：
OPTIKA I SPEKTROSKOPIYA | 1994年 / 77卷 / 01期
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
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页码：145 / 151
页数：7
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