Steppers print high-quality long diffraction gratings

被引：0
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作者：
Brinkmann, U
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来源：
LASER FOCUS WORLD | 2002年 / 38卷 / 12期
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
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页码：13 / +
页数：3
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