Formation of Si/Ge nanostructures at surfaces by self-organization

被引:25
|
作者
Voigtländer, B
Kawamura, M
Paul, N
Cherepanov, V
机构
[1] Forschungszentrum Julich, ISG, D-52425 Julich, Germany
[2] Forschungszentrum Julich, Ctr Nanoelect Syst, Cni, D-52425 Julich, Germany
关键词
D O I
10.1088/0953-8984/16/17/006
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The growth of kinetically self-organized 2D islands in Si/Si(111) epitaxy is described. The island size distribution for this system was measured using scanning tunnelling microscopy (STM). The influence of surface reconstructions on growth kinetics is studied directly using a method of simultaneous deposition and STM scanning. For the case of growth of Si islands on Si(111), lateral growth of rows of the width of the 7 x 7 reconstruction unit cell at the edges of two-dimensional islands leads to the formation of 'magic' island sizes. The evolution of the size and shape of individual {105} faceted Ge islands (hut clusters) on Si(001) is measured during growth. A slower growth rate is observed when an island grows to larger sizes. This behaviour can be explained by kinetically self-limiting growth. The potential formation of thermodynamically stable strained islands of a specific size is discussed. The formation of 2D Si/Ge nanostructures at pre-existing defects is studied. The step flow growth mode is used to fabricate Si and Ge nanowires with a width of 3.5 nm and a thickness of one atomic layer (0.3 nm) by self-assembly. One atomic layer of Bi terminating the surface is used to distinguish between the elements Si and Ge. A difference in apparent height is measured in STM images for Si and Ge. Also different kinds of two-dimensional Si/Ge nanostructure such as alternating Si and Ge nanorings having a width of 5-10 nm were grown.
引用
收藏
页码:S1535 / S1551
页数:17
相关论文
共 50 条
  • [1] Self-organization of In nanostructures on Si surfaces
    Xu, Maojie
    Okada, Arifumi
    Yoshida, Shoji
    Shigekawa, Hidemi
    [J]. APPLIED PHYSICS LETTERS, 2009, 94 (07)
  • [2] Scanning tunneling microscopy study of the growth and self-organization of Ge nanostructures on vicinal Si(111) surfaces
    Romanyuk, K. N.
    Teys, S. A.
    Olshanetsky, B. Z.
    [J]. PHYSICS OF THE SOLID STATE, 2006, 48 (09) : 1820 - 1826
  • [3] Scanning tunneling microscopy study of the growth and self-organization of Ge nanostructures on vicinal Si(111) surfaces
    K. N. Romanyuk
    S. A. Teys
    B. Z. Olshanetsky
    [J]. Physics of the Solid State, 2006, 48 : 1820 - 1826
  • [4] Nanostructures obtained by self-organization of silicon surfaces
    Röttger, B
    Hanbücken, M
    Neddermeyer, H
    [J]. APPLIED SURFACE SCIENCE, 2000, 162 : 595 - 598
  • [5] Self-organization of nanoscale Ge islands in Si/Ge/Si(113) multilayers
    Omi, H
    Ogino, T
    [J]. APPLIED SURFACE SCIENCE, 1998, 130 : 781 - 785
  • [6] Strain-driven self-organization of nanostructures on semiconductor surfaces
    Shchukin, VA
    Bimberg, D
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 67 (06): : 687 - 700
  • [7] Identifying the forces responsible for self-organization of nanostructures at crystal surfaces
    K. Pohl
    M. C. Bartelt
    J. de la Figuera
    N. C. Bartelt
    J. Hrbek
    R. Q. Hwang
    [J]. Nature, 1999, 397 : 238 - 241
  • [8] Strain-driven self-organization of nanostructures on semiconductor surfaces
    V.A. Shchukin
    D. Bimberg
    [J]. Applied Physics A, 1998, 67 : 687 - 700
  • [9] Identifying the forces responsible for self-organization of nanostructures at crystal surfaces
    Pohl, K
    Bartelt, MC
    de la Figuera, J
    Bartelt, NC
    Hrbek, J
    Hwang, RQ
    [J]. NATURE, 1999, 397 (6716) : 238 - 241
  • [10] Mechanisms of self-organization of Ge/Si(001) quantum dots
    Le Thanh, V
    [J]. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2004, 23 (3-4): : 401 - 409