Optimization of Structure of Large Format TES Arrays

被引：2
|
作者：
Yoshitake, H. [1 ]
Ezoe, Y. [2 ]
Yoshino, T. [1 ]
Mukai, K. [1 ]
Ishikawa, K. [2 ]
Mitsuda, K. [1 ]
Yamasaki, N. Y. [1 ]
Ishisaki, Y. [2 ]
Akamatsu, H. [2 ]
Maeda, R. [3 ]
Takano, T. [3 ]
机构：
[1] Japan Aerosp Explorat Agcy, Inst Space & Astronaut Sci, ISAS JAXA, Sagamihara, Kanagawa 2298510, Japan
[2] Tokyo Metropolitan Univ, Tokyo 1920397, Japan
[3] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan
来源：
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2009年 / 19卷 / 03期
关键词：
Transition edge sensor; x-ray microcalorimeter; X-RAY MICROCALORIMETERS; ABSORBER DESIGN; CALORIMETER; RESOLUTION;
D O I：
10.1109/TASC.2009.2019227
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We fabricated 16 16 format arrays of 180 square Ti/Au superconducting transition edge X-ray microcalorimeters of which transition temperatures range from 130 to 220 mK. All pixels are wired with Al, and stand on SiO2 and SiNx membranes that work as a weak thermal link. The membrane structure is formed by deep reactive ion etching. Energy resolution of a pixel in the array without a Au absorber was 11 eV (FWHM) at 5.9 keV, while the baseline resolution is about 3.7 eV.
引用
收藏
页码：456 / 459
页数：4
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