Preparation and application of monodisperse spherical polymethylsilsesquioxane (PMSQ) beads by sol-gel method

被引:8
|
作者
Hong, Franklin Chau-Nan [1 ]
Yan, Cyun-Jhe [1 ]
机构
[1] Natl Cheng Kung Univ, Dept Chem Engn, Tainan 70101, Taiwan
关键词
Monodisperse polymethylsilsesquioxane spheres; Hydrophobic; Anisotropic wet etching; Patterned microstructures; CONTROLLED HYDROLYTIC POLYCONDENSATION; COLLOIDAL PHOTONIC CRYSTALS; SILANE COUPLING AGENTS; SILICA NANOPARTICLES; SURFACE MODIFICATION; SIZE; PARTICLES; SPHERES; BANDGAP; GROWTH;
D O I
10.1016/j.apt.2018.03.027
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
We have prepared monodisperse polymethylsilsesquioxane (PMSQ) microspheres with the diameters of 0.5-4 mu m in aqueous solution by a sol-gel method. The as-prepared PMSQ beads are modified with hexamethyldisiloxane (HMDSO) under highly acidic conditions to form hydrophobic trimethylsilylated spheres. A continuous lift-up method was developed to perform monolayer self-assembly ordered arrays of the hydrophobic PMSQ microspheres on the large area substrate (> 14 cm in length). We further reported a novel patterning method to control the sizes and the pitches of the arrayed microscale patterns independently. The technology to fabricate the large area arrayed microstructures may find applications in the manufacture of flexible micro-devices. (C) 2018 The Society of Powder Technology Japan. Published by Elsevier B.V. and The Society of Powder Technology Japan. All rights reserved.
引用
收藏
页码:1632 / 1639
页数:8
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