Aspect ratio engineering of microlens arrays in thin-film flip-chip light-emitting diodes

被引:13
|
作者
Zhu, Peifen [1 ,2 ]
Tan, Chee-Keong [1 ]
Sun, Wei [1 ]
Tansu, Nelson [1 ]
机构
[1] Lehigh Univ, Dept Elect & Comp Engn, Ctr Photon & Nanoelect, Bethlehem, PA 18015 USA
[2] Univ Tulsa, Dept Phys & Engn Phys, Tulsa, OK 74104 USA
基金
美国国家科学基金会;
关键词
EXTRACTION EFFICIENCY ENHANCEMENT; INTERNAL QUANTUM EFFICIENCY; MICROSPHERE ARRAYS; WELLS; FABRICATION; IMPACT;
D O I
10.1364/AO.54.010299
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Light extraction efficiency of thin-film flip-chip InGaN-based light-emitting diodes (LEDs) with a TiO2 microlens arrays was calculated by employing the finite-difference time-domain method. The microlens arrays, formed by embedding hexagonal close-packed TiO2 sphere arrays in a polystyrene (PS) layer, were placed on top of the InGaN LED to serve as an intermediate medium for light extraction. By tuning the thickness of the PS layer, in-coupling and out-coupling efficiencies were optimized to achieve maximum light extraction efficiency. A thicker PS layer resulted in higher in-coupling efficiency, while a thinner PS layer led to higher out-coupling efficiency. Thus, the maximum light extraction efficiency becomes a trade-off between in-coupling and out-coupling efficiency. In addition, the cavity formed by the PS layer also affects light extraction from the LED. Our study reveals that a maximum light extraction efficiency of 86% was achievable by tuning PS thickness to 75 nm with maximized in-coupling and out-coupling efficiency accompanied by the optimized resonant cavity condition. (C) 2015 Optical Society of America
引用
收藏
页码:10299 / 10303
页数:5
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