Masked and Unmasked Machining of Glass by Micro Abrasive Jet

被引：3
|
作者：
Qiu, Y. F. [1 ]
Wang, C. Y. [1 ]
Wang, J. [1 ]
Song, Y. X. [1 ]
机构：
[1] Guangdong Univ Technol, Fac Mech & Elect Engn, Guangzhou 510006, Guangdong, Peoples R China
来源：
ULTRA-PRECISION MACHINING TECHNOLOGIES | 2009年 / 69-70卷
关键词：
Micro abrasive; Jet machining; Masked; Structure profile;
D O I：
10.4028/www.scientific.net/AMR.69-70.182
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
The micro abrasive jet machining is used to make the microfluidic channels on the glass substrate. Based on the tests with or without masks, the structure profile and erosion rate with different basic machining parameters, such as nozzle standoff distance, scanning speed, abrasive mass flow rate etc. are investigated. The optimum parameters for micro-structure machining of glass is discussed. The effect of the secondary rebounding particles in mask underetching was analyzed using oblique machining. And the flux effect was also studied comparing with the unmasked machining.
引用
收藏
页码：182 / +
页数：2
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