Enhanced Large Signal Performance of PZT Thick Film Actuators for Active Micro-Optics

被引：0

作者：

Ernst, Doerthe ^{[1
]}

Bramlage, Bernhard ^{[1
]}

Gebhardt, Sylvia ^{[1
]}

Schoenecker, Andreas ^{[1
]}

Pabst, Oliver ^{[2
]}

Schreiner, Hans-Juergen ^{[3
]}

机构：

[1] IKTS, Fraunhofer Inst Ceram Technol & Syst, Dresden, Germany

[2] Univ Jena, Abbe Ctr Photon, Inst Appl Phys, Jena, Germany

[3] CeramTec GmbH, Multifunct Ceram, Lauf, Germany

来源：

2013 IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRIC AND WORKSHOP ON THE PIEZORESPONSE FORCE MICROSCOPY (ISAF/PFM) | 2013年

关键词：

PZT; Thick Film; Screen Printing; Actuator; Cantilever;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Screen-printed lead zirconate titanate (PZT) thick film actuators are beneficial for miniaturized devices due to their flat profile and accurate net-shaped fabrication. Sintering progress and piezoelectric performance depend on the type and amount of sintering additive. Cantilever structures were fabricated by the use of screen printing technology with a systematic variation of the sintering additive content and for two different piezoceramic base materials. Their microstructure, small and large signal properties were characterized. Based on the experimental data we developed an actuator frame to lift a micro-lens array within a low-profile microscope by 115 mu m.

引用

页码：5 / 8

页数：4

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