Preparation of thick PZT film by electrostatic spray deposition (ESD) for the application in micro-system technology

被引：1
|
作者：
Lu, J [1 ]
Chu, JR [1 ]
Huang, WH [1 ]
Ping, ZM [1 ]
机构：
[1] Univ Sci & Technol China, Dept Precis Machinery & Instrum, Hefei 230027, Peoples R China
来源：
MICROPROCESSES AND NANOTECHNOLOGY 2001, DIGEST OF PAPERS | 2001年
关键词：
D O I：
10.1109/IMNC.2001.984159
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：200 / 201
页数：2
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