共 50 条
- [22] The lithography expert - Line-edge roughness, Part 3 MICROLITHOGRAPHY WORLD, 2007, 16 (03): : 12 - 13
- [23] Multitaper and multisegment spectral estimation of line-edge roughness JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2017, 16 (03):
- [24] Characterization and simulation of surface and line-edge roughness in photoresists JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06): : 2694 - 2698
- [25] The lithography expert - Line-edge roughness, part 1 MICROLITHOGRAPHY WORLD, 2007, 16 (01): : 13 - +
- [26] Uncertainty in roughness measurements: putting error bars on line-edge roughness JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2017, 16 (01):
- [28] On the Role of Line-Edge Roughness on the Diffusion and Localization in GNRs 2010 14TH INTERNATIONAL WORKSHOP ON COMPUTATIONAL ELECTRONICS (IWCE 2010), 2010, : 45 - 48
- [29] Impact of Channel Line-Edge Roughness On Junctionless FinFET PROCEEDINGS OF THE 2015 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC), 2015, : 106 - 109
- [30] Optimal Method for Correct Measurement of Line-edge roughness 2012 6TH INTERNATIONAL CONFERENCE ON NEW TRENDS IN INFORMATION SCIENCE, SERVICE SCIENCE AND DATA MINING (ISSDM2012), 2012, : 112 - 115