Challenges in the development of precise positioning systems for MEMS/nanotechnology

被引：0

作者：

Zhao, S ^{[1
]}

Tan, KK ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore

来源：

DEVICE AND PROCESS TECHNOLOGIES FOR MEMS, MICROELECTRONICS, AND PHOTONICS III | 2004年 / 5276卷

关键词：

precise positioning systems; ripple compensation; disturbance observer; notch filter; geometrical error compensation;

D O I：

10.1117/12.548710

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, the development of an integrated and open-architecture precision motion control system is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface, and all constituent control components will be elaborated on in the paper.

引用

页码：119 / 130

页数：12

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