Positioning systems for manufacturing in nanotechnology

被引：0
|
作者：
Gloess, R [1 ]
Di Leo, M [1 ]
机构：
[1] Phys Instrumente PI GMBH & C KG, D-76228 Karlsruhe, Germany
来源：
NANOFAIR 2003: NEW IDEAS FOR INDUSTRY | 2003年 / 1803卷
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：59 / 62
页数：4
相关论文
共 50 条
  • [1] Challenges in the development of precise positioning systems for MEMS/nanotechnology
    Zhao, S
    Tan, KK
    [J]. DEVICE AND PROCESS TECHNOLOGIES FOR MEMS, MICROELECTRONICS, AND PHOTONICS III, 2004, 5276 : 119 - 130
  • [2] Nanotechnology and manufacturing
    Ghosh, A
    [J]. CHEMICAL PROCESSING, 2002, 65 (12): : 8 - 8
  • [3] Nanotechnology and manufacturing
    Von Ehr, JR
    [J]. MANUFACTURING ENGINEERING, 2005, 134 (02): : 18 - 19
  • [4] Vehicle positioning in cell manufacturing systems via robust optimization
    Vahdani, Behnam
    [J]. Applied Soft Computing Journal, 2014, 24 : 78 - 85
  • [5] Energy Cost-Efficient Task Positioning in Manufacturing Systems
    Bozek, Andrzej
    [J]. ENERGIES, 2020, 13 (19)
  • [6] Vehicle positioning in cell manufacturing systems via robust optimization
    Vahdani, Behnam
    [J]. APPLIED SOFT COMPUTING, 2014, 24 : 78 - 85
  • [7] Vehicle positioning in cell manufacturing systems via robust optimization
    Vahdani, Behnam
    [J]. Applied Soft Computing Journal, 2014, 24 : 78 - 85
  • [8] The Application of Nanotechnology for Mechanical Manufacturing
    Gu, Li-zhi
    Hong, Qi
    Xiang, Chun-jiang
    [J]. ADVANCED PRECISION ENGINEERING, 2010, 447-448 : 86 - 90
  • [9] The Application of Nanotechnology for Green Manufacturing
    Hong, Qi
    Gu, Lizhi
    Jie, Xiaojun
    Wu, Hao
    Lei, Peng
    [J]. MANUFACTURING PROCESSES AND SYSTEMS, PTS 1-2, 2011, 148-149 : 498 - 502
  • [10] Nanoscience to nanotechnology to manufacturing transition
    Narayan, Jagdish
    [J]. INTERNATIONAL JOURNAL OF NANOTECHNOLOGY, 2012, 9 (10-12) : 914 - 941
12345