共 50 条
- [1] MEMS-based inertial systems [J]. INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS, 2007, 37 (04): : 199 - 209
- [3] Challenges in the development of precise positioning systems for MEMS/nanotechnology [J]. DEVICE AND PROCESS TECHNOLOGIES FOR MEMS, MICROELECTRONICS, AND PHOTONICS III, 2004, 5276 : 119 - 130
- [5] Packaging and qualification of MEMS-based space systems [J]. NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, : 503 - 508
- [6] Nanotechnology environmental, health, and safety challenges, research, and opportunities panel [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2016, 252
- [7] Eye safety considerations and performance comparison of flash- and MEMS-based lidar systems [J]. OPTICS, PHOTONICS AND DIGITAL TECHNOLOGIES FOR IMAGING APPLICATIONS VI, 2021, 11353
- [9] MEMS and nanotechnology: challenges and opportunities. The case of the fight against tuberculosis. [J]. MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS III, 2011, 8031
- [10] A MEMS-based, wireless, biometric-like security system [J]. MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS II, 2010, 7679