Packaging and qualification of MEMS-based space systems

被引：6
|
作者：
Muller, L [1 ]
Hecht, MH [1 ]
Miller, LM [1 ]
Rockstad, HK [1 ]
Lyke, JC [1 ]
机构：
[1] CALTECH,JET PROP LAB,CTR SPACE MICROELECTR TECHNOL,PASADENA,CA 91109
来源：
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS | 1996年
关键词：
D O I：
10.1109/MEMSYS.1996.494033
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：503 / 508
页数：6
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