共 50 条
- [32] Side-by-side wafer bonding of InP for use with stepper-based lithography JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (04): : 2110 - 2112
- [33] Wafer bonding of InP to Si and its application to optical devices JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (3B): : 1383 - 1390
- [34] Crystalline defects in InP-to-silicon direct wafer bonding Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2001, 40 (08): : 4837 - 4844
- [35] Direct bonding of GaInAsP/InP membrane structure on SOI wafer 2006 INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS CONFERENCE PROCEEDINGS, 2006, : 275 - +
- [36] Crystalline defects in InP-to-silicon direct wafer bonding JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (08): : 4837 - 4844
- [39] InAs/GaAs quantum dot infrared photodetector on a Si substrate by means of metal wafer bonding and epitaxial lift-off OPTICS EXPRESS, 2017, 25 (15): : 17562 - 17570