Aspherical mirror measurement using a point diffraction interferometer

被引：6

作者：

Ota, K ^{[1
]}

Yamamoto, T ^{[1
]}

Fukuda, Y ^{[1
]}

Otaki, K ^{[1
]}

Nishiyama, I ^{[1
]}

Okazaki, S ^{[1
]}

机构：

[1] ASET EUV Lab, Atsugi, Kanagawa 2430198, Japan

来源：

EMERGING LITHOGRAPHIC TECHNOLOGIES VI, PTS 1 AND 2 | 2002年 / 4688卷

关键词：

D O I：

10.1117/12.472343

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An point diffraction interferometry (PDI) system is used for measurement of EUV aspherical mirrors, because diffracted light by a small aperture has a nearly ideal spherical wavefront and EUV projection systems is designed with mild aspheres so that the mirrors can be tested at the center curvature without null optics. An advanced point diffraction interferometer has been developed and its precision and accuracy performance tested with a spherical mirror have been reported in last year(1). After that, the diameter of the pinhole employed in the PDI system is switched from 1.0 mum to 0.5 mum in anticipation of measurement accuracy improvement. An aspherical mirror is measured, and the system error is estimated from the aspherical measurement data. In this system error estimation, an aspherical mirror designed for a four-mirrors EUV projection optics is used.

引用

页码：690 / 694

页数：3

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