Infrared metrology for spintronic materials and devices

被引:6
|
作者
Vopsaroiu, M. [1 ]
Stanton, T. [2 ]
Thomas, O. [1 ]
Cain, M. [1 ]
Thompson, S. M. [2 ]
机构
[1] Natl Phys Lab, Teddington TW11 0LW, Middx, England
[2] Univ York, Dept Phys, York YO10 5DD, N Yorkshire, England
关键词
magneto-refractive effect; non-contact GMR; IR reflectivity; GIANT MAGNETORESISTANCE; CONTACTLESS MEASUREMENT; GRANULAR FILMS;
D O I
10.1088/0957-0233/20/4/045109
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Magneto-resistance is the most important characteristic of spintronic materials. This is usually measured using electrical contact probe testing. In this paper, we discuss a simple optical infrared (IR) experiment that allows the non-contact measurement of the magneto-resistance of spintronic materials and devices. The results are compared with characteristic electrical giant magneto-resistance (GMR) curves and show good agreement. The instrument is simpler and more compact than previous demonstrators, offering the possibility of routine measurement. The ability to measure a GMR profile using a non-contact, non-destructive IR technique has important implications, enabling in situ sample testing, non-contact profiling of the GMR at a wafer level and spatial resolution GMR measurements.
引用
收藏
页数:5
相关论文
共 50 条
  • [11] Fundamentals of nanostructured magnetic materials for spintronic devices
    Davidson, B. A.
    RIVISTA DEL NUOVO CIMENTO, 2007, 30 (04): : 159 - 196
  • [12] Hybrid magnetic/semiconduct or spintronic materials and devices
    Xu, Y. B.
    Ahmad, E.
    Claydon, J. S.
    Lu, Y. X.
    Hassan, S. S. A.
    Will, I. G.
    Cantor, B.
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2006, 304 (01) : 69 - 74
  • [13] Spintronic materials and devices based on antiferromagnetic metals
    Wang, Y. Y.
    Song, C.
    Zhang, J. Y.
    Pan, F.
    PROGRESS IN NATURAL SCIENCE-MATERIALS INTERNATIONAL, 2017, 27 (02) : 208 - 216
  • [14] Metrology for emerging research materials and devices
    Garner, C. Michael
    Herr, Dan
    FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007, 2007, 931 : 34 - +
  • [15] Infrared reflectometry for metrology of trenches in power devices
    Duran, C. A.
    Maznev, A. A.
    Merklin, G. T.
    Mazurenko, A.
    Gostein, M.
    2007 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, 2007, : 73 - +
  • [16] Spintronic Materials: Nanostructures and Devices (SMND-2011)
    Chowdhury, P.
    Krishnan, M.
    Barshilia, H. C.
    Rao, D. V. Sridhara
    Shivakumar, C.
    BRNS, AICTE, DST, CSIR AND ISRO SPONSORED NATIONAL CONFERENCE ON SPINTRONIC MATERIALS: NANOSTRUCTURES AND DEVICES (SMND-2011), 2013, 49 : 100 - 108
  • [17] Two-dimensional magnetic materials for spintronic devices
    Mi, Mengjuan
    Xiao, Han
    Yu, Lixuan
    Zhang, Yingxu
    Wang, Yuanshuo
    Cao, Qiang
    Wang, Yilin
    MATERIALS TODAY NANO, 2023, 24
  • [18] Metrology challenges for emerging research devices and materials
    Garner, C. Michael
    Vogel, Eric M.
    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2006, 19 (04) : 397 - 403
  • [19] Technology and metrology of new electronic materials and devices
    Vogel, Eric M.
    NATURE NANOTECHNOLOGY, 2007, 2 (01) : 25 - 32
  • [20] Metrology for Advanced Transistor and Memristor Devices and Materials
    Diebold, Alain C.
    Cady, Nathaniel C.
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXIV, 2020, 11325