Flat panel imagers with pixel level amplifiers based on polycrystalline silicon thin-film transistor technology

被引：35

作者：

Lu, JP ^{[1
]}

Van Schuylenbergh, K ^{[1
]}

Ho, J ^{[1
]}

Wang, Y ^{[1
]}

Boyce, JB ^{[1
]}

Street, RA ^{[1
]}

机构：

[1] Xerox Corp, Palo Alto Res Ctr, Palo Alto, CA 94304 USA

来源：

APPLIED PHYSICS LETTERS | 2002年 / 80卷 / 24期

关键词：

D O I：

10.1063/1.1481788

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report here the realization of a large-area compatible, flat panel imager with pixel level amplifiers. The imager is based on excimer-laser crystallized, polycrystalline silicon (poly-Si) thin-film transistors. By incorporating pixel level amplification, flat panel imagers are expected to be able to achieve unprecedented noise performance, with the hope of achieving single photon detection. We have demonstrated good noise performance of 1300 erms, exceeding the commonly accepted industry standard of 2000 erms. We also briefly discuss the source of the extra noise, as well as the possibility of further reducing the noise level. (C) 2002 American Institute of Physics.

引用

页码：4656 / 4658

页数：3

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