Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection

被引：44
|
作者：
Takeda, M
Aoki, T
Miyamoto, Y
Tanaka, H
Gu, RW
Zhang, ZB
机构：
[1] Univ Electrocommun, Dept Informat & Commun Engn, Chofu, Tokyo 182, Japan
[2] OPTON Co Ltd, Res Lab 3D, Aichi 4898645, Japan
来源：
OPTICAL ENGINEERING | 2000年 / 39卷 / 01期
关键词：
profilometry; shape measurement; optical metrology; three-dimensional sensing;
D O I：
10.1117/1.602336
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
For the absolute and shade-free shape measurement of 3-D objects with large height discontinuities, a coaxial optical sensor system with a common image plane for pattern projection and observation is proposed. Experimental results are presented that demonstrate the shape measurements of objects with a deep hole and large discontinuities. (C) 2000 Society of Photo-Optical instrumentation Engineers. [S0091-3286(00)00701-7].
引用
收藏
页码：61 / 68
页数：8
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