High precision three-dimensional optical measurement module using Fourier transform profilometry

被引：0
|
作者：
Sung, HY [1 ]
Tien, LF [1 ]
Lin, CY [1 ]
Lin, YM [1 ]
Lo, CY [1 ]
Tao, TH [1 ]
机构：
[1] ITRI, Ctr Measurement Stand, Hsinchu, Taiwan
来源：
PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 2 | 2002年
关键词：
three dimensional shape measurement; Fourier transform profilometry; phase unwrapping;
D O I：
暂无
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
By using a telecentric profile projector with a sinusoidal grating and by capturing the feature-modulated image with a linear CCD camera, we develop a high precision three-dimensional optical measurement module according to Fourier transform profilometry. This paper gives the experimental results of the present three-dimensional profile optical measurement module. The repeatability was better than 5um within 3. . limits.
引用
收藏
页码：271 / 276
页数：6
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