CRITICALITY MEASURES FOR TIME CONSTRAINT TUNNELS IN SEMICONDUCTOR MANUFACTURING

被引：0

作者：

Anthouard, Benjamin ^{[1
]}

Borodin, Valeria ^{[1
]}

Dauzere-Peres, Stephane ^{[1
]}

Christ, Quentin ^{[2
]}

Roussel, Renaud ^{[2
]}

机构：

[1] Univ Clermont Auvergne, Mines St Etienne, UMR 6158 LIMOS, CNRS, 880 Ave Mimet, F-13129 Gardanne, France

[2] STMicroelectronics, 850 Rue Jean Monnet, F-38920 Crolles, France

来源：

2022 WINTER SIMULATION CONFERENCE (WSC) | 2022年

关键词：

SHIFTING BOTTLENECK PROCEDURE;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

Semiconductor manufacturing processes include more and more (queue) time constraints often spanning multiple operations, which impact both production efficiency and quality. After recalling the problem of time constraint management, this paper focuses on the notion of criticality defined in terms of time constraints at an operational decision level. Various criticality measures are presented. A discrete-event simulation-based approach is used to evaluate the criticality of machines for time constraints. Computational experiments conducted on industrial instances are discussed. The paper ends with some conclusions and perspectives.

引用

页码：3326 / 3337

页数：12

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