Precision Resistor Laser Trimming for Analog Microelectronics

被引：0

作者：

Meunier, Michel ^{[1
,2
]}

Gagnon, Yves ^{[2
]}

Lacourse, Alain ^{[2
]}

Ducharme, Mathieu ^{[2
]}

Rioux, Simon ^{[2
]}

Savaria, Yvon ^{[1
,2
]}

机构：

[1] Ecole Polytech, Laser Proc Lab, Dept Engn Phys, POB 6079,Stn Ctr Ville, Montreal, PQ H3C 3A7, Canada

[2] LTRIM Technol, Laval, PQ H7V 4B4, Canada

来源：

2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5 | 2007年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fast, low cost laser trimming technique of highly accurate resistor has been developed for analogue microelectronics. Modelling of the technique is described and an example of tuning a reference voltage circuit is given. (C) 2007 Optical Society of America

引用

页码：2793 / 2793

页数：1

共 50 条

[1] AUTOMATIC LASER RESISTOR TRIMMING
BADER, RF
SOLID STATE TECHNOLOGY, 1972, 15 (09) : 44 - &
[2] A novel laser trimming technique for microelectronics
Meunier, M
Gagnon, Y
Savaria, Y
Lacourse, A
Cadotte, M
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING VI, 2001, 4274 : 385 - 392
[3] RESISTOR TRIMMING AND MICROMACHINING WITH A YAG LASER
WATERS, RL
WEINER, MJ
SOLID STATE TECHNOLOGY, 1970, 13 (04) : 43 - &
[4] A novel laser trimming technique for microelectronics
Meunier, M
Gagnon, Y
Savaria, Y
Lacourse, A
Cadotte, M
APPLIED SURFACE SCIENCE, 2002, 186 (1-4) : 52 - 56
[5] POLYSILICON RESISTOR TRIMMING BY LASER LINK MAKING
PARKER, DL
HUANG, WL
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1990, 3 (02) : 80 - 83
[6] HIGH PRODUCTION ANALOG-CONTROLLED RESISTOR TRIMMING MACHINE
BUNCH, DL
FREER, RP
AMERICAN CERAMIC SOCIETY BULLETIN, 1971, 50 (09): : 798 - &
[7] EXCIMER-LASER SHAPES UP RESISTOR TRIMMING
LOCKYER, EN
PHOTONICS SPECTRA, 1995, 29 (10) : 30 - 30
[8] INTRODUCTION TO THICK-FILM RESISTOR TRIMMING BY LASER
OAKES, M
OPTICAL ENGINEERING, 1978, 17 (03) : 217 - 224
[9] ANALOG-CONTROLLED, HIGH-PRODUCTION RESISTOR TRIMMING MACHINE
BUNCH, DL
FREER, RP
SOLID STATE TECHNOLOGY, 1972, 15 (05) : 41 - &
[10] High precision, small geometry laser trimming for emerging microelectronics devices - art. no. 64590K
Gu, Bo
Laser-based Micro- and Nanopackaging and Assembly, 2007, 6459 : K4590 - K4590

← 1 2 3 4 5 →