Design and Analysis of Various Microcantilever Shapes for MEMS Based Sensing

被引：11

作者：

Hawari, H. F. ^{[1
]}

Wahab, Y. ^{[1
]}

Azmi, M. T. ^{[1
]}

Shakaff, A. Y. Md ^{[1
]}

Hashim, U. ^{[1
]}

Johari, S. ^{[1
]}

机构：

[1] Univ Malaysia Perlis, Sch Microelect Engn, Adv Multidisciplinary MEMS Based Integrated Elect, Kuala Perlis 02000, Perlis, Malaysia

来源：

2014 INTERNATIONAL CONFERENCE ON SCIENCE & ENGINEERING IN MATHEMATICS, CHEMISTRY AND PHYSICS (SCIETECH 2014) | 2014年 / 495卷

关键词：

D O I：

10.1088/1742-6596/495/1/012045

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

One the major requirements for sensing devices is its sensitivity. This paper presents the design, analysis and simulation of various types of MEMS based microcantilevers shapes and their influence on sensing sensitivity. A commercial finite element analysis software ANSYS is used to analyze the designs. Six different analytical model of the microcantilever were investigated for its Equivalent (von-Mises) stress, maximum deflection and fundamental resonant frequency. Finally, the best sensitive structure is then identified. It is found that the trapezoidal design microcantilever would have significant sensing advantages compared to other remaining microcantilever shape.

引用

页数：9

共 50 条

[41] A fast reliability assessment method for Si MEMS based microcantilever beams
Rafiee, P.
Khatibi, G.
MICROELECTRONICS RELIABILITY, 2014, 54 (9-10) : 2180 - 2184
[42] Analysis of Gyrocompassing through Miniaturized MEMS Based on Piezoresistive Sensing
Dellea, S.
Giacci, F.
Longoni, A. F.
Langfelder, G.
Rey, P.
Robert, Ph.
2016 3RD IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, 2016, : 25 - 28
[43] Optimizing the piezoresistive design on the microcantilever for enhancing stress sensing and temperature effects
Suresh, Vasagiri
Burra, Rajesh Kumar
AIP ADVANCES, 2024, 14 (01)
[44] Microcantilever geometry analysis for array sensor design
Katta, Miranji
Sandanalakshmi, R.
Veerraju, V.
MATERIALS TODAY-PROCEEDINGS, 2022, 50 : 1496 - 1501
[45] Design and Simulation of Silicon-Based Suspension Beams for Various MEMS Sensors
Taj, Mohammad
Pitchaiah, Telagathoti
Sasikumar, Bashyam
ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, 2022, 2022
[46] Design & analysis of diaphragm for MEMS based pressure sensors
Thakar, Vishal C.
Patel, Bhakti N.
Karsh, P. K.
MATERIALS TODAY-PROCEEDINGS, 2022, 65 : 3683 - 3687
[47] Mems-based gyroscope: Design, analysis and simulation
Sharaf, Abdelhameed
Sedky, Sherif
Ashour, Mahmoud A.
Habib, S. E. -D.
PROCEEDINGS OF THE ASME 2ND MULTIFUNCTIONAL NANOCOMPOSITES AND NANOMATERIALS CONFERENCE 2008: DESIGN AND MODELING OF NANOCOMPOSITES AND NANOMATERIALS - FABRICATION OF NANOCOMPOSITES, MATERIALS AND DEVICES - MULTIFUNCTIONALITIES IN NANOCOMPOSITES AND NANOMATERIALS - NANOMATERIALS FOR BIOMEDICAL APPLICATIONS, 2008, : 27 - 31
[48] The Design and analysis of Universal Inertial Switch Based MEMS
Hao, Yongping
Bao, Liya
Gu, Shuangxi
MECHATRONICS AND APPLIED MECHANICS, PTS 1 AND 2, 2012, 157-158 : 308 - +
[49] Size-dependent behaviour of electrically actuated microcantilever-based MEMS
Farokhi, Hamed
Ghayesh, Mergen H.
INTERNATIONAL JOURNAL OF MECHANICS AND MATERIALS IN DESIGN, 2016, 12 (03) : 301 - 315
[50] Modeling and flow analysis of piezoelectric based micropump with various shapes of microneedle
Rakesh Kumar Haldkar
Vijay Kumar Gupta
Tanuja Sheorey
Journal of Mechanical Science and Technology, 2017, 31 : 2933 - 2941

← 1 2 3 4 5 →