Design and Analysis of Various Microcantilever Shapes for MEMS Based Sensing

被引：11

作者：

Hawari, H. F. ^{[1
]}

Wahab, Y. ^{[1
]}

Azmi, M. T. ^{[1
]}

Shakaff, A. Y. Md ^{[1
]}

Hashim, U. ^{[1
]}

Johari, S. ^{[1
]}

机构：

[1] Univ Malaysia Perlis, Sch Microelect Engn, Adv Multidisciplinary MEMS Based Integrated Elect, Kuala Perlis 02000, Perlis, Malaysia

来源：

2014 INTERNATIONAL CONFERENCE ON SCIENCE & ENGINEERING IN MATHEMATICS, CHEMISTRY AND PHYSICS (SCIETECH 2014) | 2014年 / 495卷

关键词：

D O I：

10.1088/1742-6596/495/1/012045

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

One the major requirements for sensing devices is its sensitivity. This paper presents the design, analysis and simulation of various types of MEMS based microcantilevers shapes and their influence on sensing sensitivity. A commercial finite element analysis software ANSYS is used to analyze the designs. Six different analytical model of the microcantilever were investigated for its Equivalent (von-Mises) stress, maximum deflection and fundamental resonant frequency. Finally, the best sensitive structure is then identified. It is found that the trapezoidal design microcantilever would have significant sensing advantages compared to other remaining microcantilever shape.

引用

页数：9

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