Silver antimony Ohmic contacts to moderately doped n-type germanium

被引:11
|
作者
Dumas, D. C. S. [1 ]
Gallacher, K. [1 ]
Millar, R. [1 ]
MacLaren, I. [2 ]
Myronov, M. [3 ]
Leadley, D. R. [3 ]
Paul, D. J. [1 ]
机构
[1] Univ Glasgow, Sch Engn, Glasgow G12 8LT, Lanark, Scotland
[2] Univ Glasgow, SUPA Sch Phys & Astron, Glasgow G12 8QQ, Lanark, Scotland
[3] Univ Warwick, Dept Phys, Coventry CV4 7AL, W Midlands, England
基金
英国工程与自然科学研究理事会;
关键词
MODEL-BASED QUANTIFICATION; EELS SPECTRA; SILICON; TRANSITION; DETECTORS; PROGRESS; LASER;
D O I
10.1063/1.4873127
中图分类号
O59 [应用物理学];
学科分类号
摘要
A self doping contact consisting of a silver/antimony alloy that produces an Ohmic contact to moderately doped n-type germanium (doped to a factor of four above the metal-insulator transition) has been investigated. An evaporation of a mixed alloy of Ag/Sb (99%/1%) onto n-Ge (N-D = 1 x 10(18) cm(-3)) annealed at 400 degrees C produces an Ohmic contact with a measured specific contact resistivity of (1.1 +/- 0.2) x 10(-5) Omega-cm(2). It is proposed that the Ohmic behaviour arises from an increased doping concentration at the Ge surface due to the preferential evaporation of Sb confirmed by transmission electron microscope analysis. It is suggested that the doping concentration has increased to a level where field emission will be the dominate conduction mechanism. This was deduced from the low temperature electrical characterisation of the contact, which exhibits Ohmic behaviour down to a temperature of 6.5 K. (C) 2014 AIP Publishing LLC.
引用
收藏
页数:4
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